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Query: UMLS:C0276640 (TEM)
 20,729 document(s) hit in 31,850,051 MEDLINE articles (0.00 seconds)

Gate oxynitride structures of TFT-LCDs were investigated by SIMS, and successful solutions are demonstrated to overcome difficulties arising due to the charging effects of the multilayer systems, the matrix effect of the method, and the small pattern sizes of the samples. Because of the excellent reproducibility achieved by applying exponential relative sensitivity functions for quantitative analysis, minor differences in the barrier gate-oxynitride composition deposited on molybdenum capped aluminium-neodymium metallisation electrodes were determined between the centre and the edge of the TFT-LCD substrates. No differences were found for molybdenum-tungsten metallisations. Furthermore, at the edge of the glass substrates, aluminium, neodymium, and molybdenum SIMS depth profiles show an exponential trend. With TEM micrographs an inhomogeneous thickness of the molybdenum capping is revealed as the source of this effect, which influences the electrical behaviour of the device. The production process was improved after these results and the aging behaviour of TFT-LCDs was investigated in order to explain the change in control voltage occurring during the lifetime of the displays. SIMS and TEM show an enrichment of neodymium at the interface to the molybdenum layer, confirming good diffusion protection of the molybdenum barrier during accelerated aging. The reason for the shift of the control voltage was finally located by semi-quantitative depth profiling of the sodium diffusion originating from the glass substrate. Molybdenum-tungsten was a much better buffer for the highly-mobile charge carriers than aluminium-neodymium. Best results were achieved with PVD silicon oxynitride as diffusion barrier and gate insulator deposited on aluminium-neodymium metallisation layers.
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PMID:Quantitative SIMS depth profiling of diffusion barrier gate-oxynitride structures in TFT-LCDs. 1474 95

Composite films of nano-size nickel grains embedded in a carbonaceous matrix are synthesized by a PVD process of C(60) fullerenes and Ni acetate. The morphology of the nano-composite films is characterized by TEM, selected area electron diffraction, chemical analysis and AFM. Correlations with deposition parameters and typical structure changes are found. The mechanical properties are analyzed by nanoindentation. The load-displacement charts show typical pop-ins correlated with the heterogeneous nano-structure. The depth dependent hardness and indentation modulus vary according to the nano-composite structure and reflect the changes of the mechanical properties in the film.
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PMID:Nanoindentation of heterogeneous carbonaceous films containing Ni nano-crystals. 1828 64

In the present paper, the effect of residual stress on the mechanical behavior of thin hard coatings has been investigated by a new methodology based on the combined use of focused ion beam (FIB) micro-machining techniques and nanoindentation testing. Surface elastic residual stress were determined by nanoindentation testing on Focused Ion Beam (FIB) milled micro-pillars. The average residual stress present in a 3.8 microm CAE-PVD TiN coating on WC-Co substrate was calculated by the comparison of two different sets of load-depth curves, the first one obtained at centre of stress relieved pillars, the second one on the undisturbed (residually stressed) surface. Results for stress measurement were in good agreement with the estimate obtained by XRD (sin2 psi method) analysis on the same sample, adopting the same elastic constants. In addition, nanoindentation on stress relieved pillars also allowed to perform a more accurate evaluation of elastic modulus and hardness of the coating. The effect of residual stress on crack propagation modes was quantitatively analyzed by high-load nanoindentation and application of energy methods for fracture toughness evaluation. It is found that compressive residual stress plays a relevant role in determining the fracture behavior and failure modes of the coating. Finally, Microstructural observations of the deformation mechanisms of the TiN coating were performed by TEM analysis on the cross section of the indentation, obtained by FIB lamella thinning. Results showed that plastic deformation at the nanoscale essentially occurs by formation of shear bands inside the columnar grains, independently of residual stress. A transition between intra-granular shear deformation and columnar grain sliding is also observed as a function of the applied load.
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PMID:On the influence of residual stress on nano-mechanical characterization of thin coatings. 2240 Feb 73